| Electrochemistry,
Vol. 72. No.6, 2004 |
Hideki MASUDA,a,b Futoshi MATSUMOTO,a and Kazuyuki NISHIO@a,b
aDepartment of Applied Chemistry, Tokyo Metropolitan University
(1]1 Minamiosawa, Hachioji, Tokyo 192]03, Japan)
bKanagawa Academy of Science and Technology (KAST) (5]4]30 Nishi]Hashimoto,
Sagamihara, Kanagawa 229]1131, Japan)
Received March 29, 2004 ; Accepted April 30, 2004
Two types of preparation processes for highly ordered hole array structures
of anodic porous alumina are described. In the naturally occurring ordering,
long]range ordered hole configuration was obtained under appropriate anodization
conditions. The pretexturing process using a mold yielded ideally ordered hole
configuration with a single domain structure over the sample. Obtained highly
ordered anodic porous alumina membranes were applied to preparation of several
types of functional nanodevices. In addition, replication processes using highly
ordered anodic porous alumina as a starting structure are described. Highly
ordered metal and semiconductor hole arrays prepared by the replication processes
were applied to the preparation of several types of functional electrodes.
Shota KOBAYASHI, Yoshiharu UCHIMOTO, and Masataka WAKIHARA@
Department of Applied Chemistry, Graduate School of Science and Engineering, Tokyo Institute of Technology (2]12]1, Ookayama, Meguro]ku, Tokyo 152]8552, Japan)
Received November 4, 2003 ; Accepted December 17, 2003
Nano]sized particle manganese dioxides were synthesized by reduction process
using NaMnO4 precursor and fumaric acid as the reducing agent. Transmission
electron microscopy examination showed size distribution of particles besides
in the range of a few to 10nm. The high specific capacity of 350mAh g-1
was observed during first charge. The electronic structure of synthesized samples
before and after lithium ion intercalation and^or deintercalation was investigated
by Mn L]edge and O K]edge X]ray absorption spectroscopy.
Yasuhiro SHIMIZU, Ayami JONO, Takeo HYODO, and Makoto EGASHIRA
Department of Materials Science and Engineering, Faculty of Engineering, Nagasaki University (1]14 Bunkyo]machi, Nagasaki 852]8521, Japan)
Received November 19, 2003 ; Accepted March 9, 2004
Large mesoporous SnO2 powders have been prepared from SnCl4E5H2O
by a templating method using a triblock copolymer as a surfactant. Ethanol]rinsing
of resulting precipitates resulted in formation of large mesoporous SnO2
powder having a broad pore size distribution with a maximum pore volume around
15 nm after calcination at 400 for 5h. Treatment of as]precipitated products
with phosphoric acid was not useful for improving the thermal stability of large
mesoporous structure, whereas it prevented the growth of SnO2 crystallites
during the calcination. In contrast, large mesoporous SnO2 powders
having a sharp pore size distribution with a maximum pore volume around 3.5
nm and a specific surface area larger than 70m2 g-1 could
be prepared by deionized water]rinsing. It was revealed that aging treatment
of as]precipitated products led to a more uniform pore size distribution after
the calcination, although the specific surface area decreased accordingly.
Kenji MACHIDA, Kei FURUUCHI, Myoungki MIN, and Katsuhiko NAOI@
Graduate School of Technology, Tokyo University of Agriculture and Technology (2]24]16 Naka]cho, Koganei, Tokyo 184]8588, Japan)
Received November 22, 2003 ; Accepted March 11, 2004
Mixed proton]electron conducting nanocomposites have been formed based on
a hydrous ruthenium oxide and a proton]conducting polymer for new supercapacitor
energy storage nanomaterials with high capacitance and excellent rate capability.
The nanocoating was carried out by polymerizing nano]ordered poly m3](4]aminophenyl)propionic
acidn (PAPPA) thin film on the surface of the hydrous ruthenium oxide nanoparticles
under ultrasonic irradiation. From the transmission electron microscopy observation,
PAPPA film was found to form compactly and thinly on aggregated hydrous ruthenium
oxide particles with diameter of ca. 20 nm (primary size). At a low scan
rate of 2mV s-1, the specific capacitance obtained for the nanocomposite
electrode was 1210 F g-1 which was higher than that for the ruthenium
oxide nanoparticles itself (975 F g-1). More importantly, the nanocomposite
thin]film electrode maintained its high capacitance (ca. 1000 F g-1)
even at an ultrafast scan rate of 1000 mV s-1.
Nobuhito IMANAKA,a Young Woon KIM,a
Toshiyuki MASUI,a
Takao SAKATA,b and Hirotaro MORI@b
aDepartment of Applied Chemistry, Faculty of Engineering and
Handai Frontier Research Center, Osaka University (2]1 Yamadaoka, Suita, Osaka
565]0871, Japan)
bResearch Center for Ultra]High Voltage Electron Microscopy, Osaka
University (7]1, Mihogaoka, Ibaraki, Osaka 567]0047, Japan)
Received November 25, 2003 ; Accepted March 4, 2004
Single crystals of Al2O3 nanoparticles were successfully
synthesized by dc electrolysis of the Al3+ ion conducting Al2(WO4)2.4(MoO4)0.6
solid solution electrolyte at 11 V, 900. The particle size can be intentionally
controlled by adjusting the electrolysis periodFthe particles distributed in
the range of 100]900 nm, and the average size was 440 nm for 3 days electrolysis,
while the range and the size became 100]1400 nm and 520 nm after the electrolysis
for a week, respectively. Electron diffraction patterns for each particle evidenced
that the particles grown were ]Al2O3 because the present
electrochemical method was applicable at moderate temperatures around 900.
Yuuko NAKAMURA,a Yorinobu KATOU,b and Seichi RENGAKUJI@b
aCenter for Instrumental Analysis, Toyama University (3190
Gofuku, Toyama 930]8555, Japan)
bDepartment of System Engineering of Materials & Life Science, Faculty
of Engineering, Toyama University (3190 Gofuku, Toyama 930]8555, Japan)
Received February 25, 2004 ; Accepted March 5, 2004
In order to evaluate the photocatalytic ability of TiO2 film, quartz
crystal microbalance (QCM), which is a gravitation method, was employed instead
of the conventional absorption method. The advanced sol]gel method, which can
control thickness to the several tenths of a nanometer level, was applied to
the coating on the QCM element. India ink coated on the QCM element was used
as the model material for the photo]decomposition. The amount of decomposition
during UV light irradiation was detected by the frequency]shift. This method
was also tested in application to an organic gas sensor.
Anusorn KONGKANAND and Susumu KUWABATA@
Department of Materials Chemistry and Frontier Research Center, Graduate School of Engineering, Osaka University (2]1 Yamada]oka, Suita, Osaka 565]0871, Japan)
Received November 26, 2003 ; Accepted March 4, 2004
Preparation technique of Pt monolayer islands has been developed by combining
two techniquesGthe preparation of nanopores in a self]assembled monolayer of
alkanethiol and deposition of Pt monolayer using Cu adlayer as a reducing agent.
This novel technique gives remarkably uniform monolayer islands for island sizes
ranging from 3 to 11 nm.
Shigehito DEKI, Heisuke NISHIKAWA, and Minoru MIZUHATA
Department of Chemical Science and Engineering, Faculty of Engineering, Kobe University (1]1 Rokkodai]cho, Nada, Kobe 657]8501, Japan)
Received November 26, 2003 ; Accepted March 8, 2004
Preparation of polypyrrole (PPy) containing Pt nanoparticles was attempted.
The oxidation of pyrrole into polypyrrole proceeded by H2PtCl4,
simultaneously reducing Pt(IV) to Pt(O). The Pt particles were obtained with
average size of 2 nm and fairly narrow size distribution. Moreover, the maximum
content of Pt reached over 20 wt without any evidence of aggregation. The optimum
mPtn^mPyn, for obtaining successful Pt^PPy composite including highly concentrated
Pt and exhibiting high electrical conductivity, was determined at R0.6.
Kentaro FUNATSU, Hiro]omi KATO, and Yoichi HOSHI
Faculty of Engineering, Tokyo Polytechnic University (1583 Iiyama, Atsugi]shi, Kanagawa 243]0297, Japan)
Received November 26, 2003 ; Accepted March 19, 2004
Suppression of substrate heating during film deposition is necessary to realize
a high rate deposition of ITO films on plastic film substrate. In a sputter]deposition
of the film using a conventional magnetron sputtering system, heating power
incident into substrate was measured and mechanisms of the substrate heating
were investigated precisely. Most of the incidence power into the substrate
is originated in the bombardment of high]energy secondary electrons emitted
from the target, and can be reduced to 1/9 by removing the electron bombardment.
Compared with the total incidence power to the substrate, the heat of formation
of the film was estimated to be below 1/50. This suggests that further reduction
of the incidence power into substrate will be possible in the deposition using
a conventional magnetron sputtering system.
Ryoichi MORIMOTO,a Atsushi SUGIYAMA,b and Ryoichi AOGAKI@c
aSaitama Industrial Technology Center (3]12]18 Kamiaoki, Kawaguchi,
Saitama 333]0844, Japan)
bDomestic Research Fellow, Japan Society for Promotion of Science
(3]12]18 Kamiaoki, Kawaguchi, Saitama 333]0844, Japan)
cPolytechnic University (4]1]1, Hashimotodai, Sagamihara, Kanagawa
229]1196, Japan)
Received November 29, 2003 ; Accepted March 8, 2004
Nano]scale crystal formation in copper magneto]electrodeposition under parallel
magnetic fields was examined with X]ray diffraction. In 30 mol m|3
copper sulfate solution, below the overpotential |0.2 V, the average crystal
size decreased with magnetic field, whereas beyond |0.2 V, the average crystal
size increased in the higher range. The atomic force microscope images of the
deposits also showed the same tendency.
Hirotaka SATO,a Hideomi KOBAYASHI,a
Hiroyuki KUDO,b Toshimitsu IZUMI,b
Takayuki HOMMA,a Tetsuya OSAKA,a
Shuichi SHOJI,b Yoshitaka ISHISAKI,c
Ryuichi FUJIMOTO,d and Kazuhisa MITSUDA@d
aDepartment of Applied Chemistry and bDepartment
of Electrical Engineering and Bioscience, Waseda University (Okubo, Shinjuku,
Tokyo 169]8555, Japan)
cDepartment of Physics, Tokyo Metropolitan University (Minami]Osawa,
Hachioji, Tokyo 192]0397, Japan)
dHigh Energy Astrophysics Division, Institute of Space and Astronautical
Science, Sagamihara (Kanagawa 229]8510, Japan)
Received November 29, 2003 ; Accepted March 10, 2004
Microscale Bi electrodeposition process was developed to fabricate the array
of mushroom]shaped absorbers for the high sensitive X]ray imaging sensor, so
called X]ray microcalorimeter array. The bath composition and operating conditions
for Bi electrodeposition was optimized, and sufficient bath stability and surface
smoothness of the deposits were achieved by applying the additives such as diethylenetriamine
pentaacetic acid and sodium n]dodecyl sulfate with appropriate concentration.
By applying the two]step exposure steps for the gstem" part and the groof" part,
the mold to deposit the mushroom]shaped microstructure was formed from single]layered
photoresist coating. The absorber array was successfully fabricated by the sequential
processes of Bi electrodeposition into the mold, precise polishing, and mold
removal.
Isao TANIGUCHI,a Yasuhiro NONAKA,a
Zekerya DURSUN,a Sami BEN
AOUN,a
Changchun JIN,a Gyeong Sook BANG,a
Tesshu KOGA,a and Tadashi SOTOMURA@b
aDepartment of Applied Chemistry and Biochemistry, Kumamoto
University (2]39]1, Kurokami, Kumamoto 860]8555, Japan)
bMatushita Electric Industrial Co., Ltd. (3]1 Moriguchi, Osaka 570]8501,
Japan)
Received November 30, 2003 ; Accepted March 18, 2004
Ag ad]layer modified Au(100) and Au(111) electrodes showed excellent catalytic
behavior for oxidation of aldose type (such as glucose, maltose, galactose and
xylose) sugars. The best catalytic effect was observed at a (2~52)R45 Ag]Au(100)
electrode, 2/5 monolayer of Ag on Au(100), where the oxidation of glucose began
at |0.7 V (vs. Ag^AgCl) with a negative shift of ca. 0.2 V in oxidation
potential compared to the oxidation at a bare Au(100) electrode. As was observed
at a (3~3)R30 Ag]Au(111) electrode, 1/3 monolayer of Ag on Au(111), the catalytic
oxidation of glucose was also seen at Au(111) film electrodes with large surface
areas after deposition of Ag ad]layer.
Yuko MAEDA,a Fumiko CHIBA,b Kikuno IIDA,b Kenro TOTANI,b Kenji OGINO,a Takayuki ISHIBASHI,c Hari Singh NALWA@,d and Toshiyuki WATANABE@b
aGraduate School of Bio]Applications Systems and Engineering,
Tokyo University of Agriculture and Technology (2]24]16 Nakacho, Koganei, Tokyo
184]8588, Japan)
bDepartment of Organic and Polymer Materials Chemistry, Faculty of
Technology, Tokyo University of Agriculture and Technology (2]24]16 Nakacho,
Koganei, Tokyo 184]8588, Japan)
cDepartment of Applied Physics, Faculty of Technology, Tokyo University
of Agriculture and Technology (2]24]16 Nakacho, Koganei, Tokyo 184]8588, Japan)
dStanford Scientific Corporation (25650 North Lewis Way, Stevenson
Ranch, CA 91381, USA)
Received December 1, 2003 ; Accepted March 4, 2004
Uniform size nanorods consisting of polypyrrole were synthesized via electropolymerization
using a porous alumina template. The dispersion of polymer particles was obtained
by dissolving the template in an alkaline solution followed by dialysis with
distilled water. SEM]EDS and TEM techniques revealed that synthesized polypyrrole
nanoparticles are rod]shaped having a diameter of 20 nm.
Masami SHIBATA@ and Kazuki NEBASHI
Interdisciplinary Graduate School of Medicine and Engineering, University of Yamanashi (4]3]11 Takeda, Kofu 400]8511, Japan)
Received December 4, 2003 ; Accepted March 18, 2004
In this study, the effect of a dissolved gas on Pd deposition at the silicon
substrate in the solutions saturated with various gases in a glove box is investigated.
The number of Pd nanoparticles deposited in the solution saturated with the
mixed gas (10 H2 and 90 N2) is less than with the air
and pure oxygen gas. Also, the average size of Pd particles deposited in the
hydrogen atmosphere is larger than in the air and oxygen atmospheres. In the
solution containing the dissolved H2 gas, the Pd nucleus significantly
grows, and there are small numbers of Pd particles, because H2 oxidation
occurs only at the Pd nucleus.
Seiya TSUJIMURA, Takaaki NAKAGAWA, Kenji KANO@, and Tokuji IKEDA@
Division of Applied Life Sciences, Graduate School of Agriculture, Kyoto University (Sakyo, Kyoto 606]8502, Japan)
Received December 4, 2003 ; Accepted February 14, 2004
Direct electron transfer]type bioelectrocatalysis of four]electron reduction
of dioxygen was successfully realized with bilirubin oxidase (BOD, EC 1.3.3.5,
from Myrothecium verrucaria) at carbon electrode surfaces with high crystal
graphite edge density. It was found that adsorbed BOD functions as a biocatalyst.
The current]potential curves were interpreted by considering the enzyme catalytic
constant, surface electron transfer kinetics, surface concentration of BOD,
and the formal potential of BOD. The analysis suggested that the standard surface
electron transfer rate constant and surface coverage of gactive" enzyme depend
strongly on functional groups and^or nano]structure of carbon electrode surface.
Norihisa KOBAYASHI, Masatsugu HASHIMOTO, and Kazuhiko KUSABUKA
Department of Information and Image Sciences, and Graduate School of Science and Technology Chiba University (Chiba 263]8522, Japan)
Received December 4, 2003 ; Accepted March 16, 2004
DNA]Ru(bpy)32+ complex was prepared to study EL characteristics.
Ru(bpy)32+ was associated with duplex of DNA by the interaction
such as intercalation in the pH 3 aqueous solution. It was revealed that the
EL device composed of DNA]Ru(bpy)32+ complex exhibited
extremely faster response than the other Ru(bpy)32+ based
EL devices. The emission mechanism was discussed. DNA]Ru(bpy)32+
complex is expected to be applicable to an optoelectro]functional molecular
wire.
Takeshi SASAKI,a Naoto KOSHIZAKI,a
Jong]Won YOON,a Satoshi YAMADA,b
Michio KOINUMA,c Masayuki NOGUCHI,c
and Yasumichi MATSUMOTO@c
aNanoarchitectonics Research Center, National Institute of
Advanced Industrial Science and Technology (Central 5, 1]1]1 Higashi, Tsukuba,
Ibaraki 305]8565, Japan)
bDepartment of Aerospace Engineering, School of Science and Engineering,
Teikyo University (1]1 Toyosatodai, Utsunomiya 320]8551, Japan)
cDepartment of Applied Chemistry and Biochemistry, Faculty of Engineering,
Kumamoto University (2]39]1 Kurokami, Kumamoto 860]8555, Japan)
Received December 5, 2003 ; Accepted March 22, 2004
The photoelectrochemical behavior of the Pt^TiO2 nanocomposite
electrodes in aqueous 0.1M Na2SO4 electrolyte was
investigated. Pt^TiO2 nanocomposite films (platinum nanoparticles
dispersed in TiO2 films) and TiO2 films deposited on ITO
glass substrates by the sputtering were used as electrodes. Anodic photocurrent
of Pt^TiO2 nanocomposite electrode at potential higher than 0.5 V
vs. Ag^AgCl under the irradiation of Xenon lamp was one order smaller in the
magnitude than that of TiO2 electrode, resulting from the recombination
between hole and electron at Pt particles. Anodic photocurrent of Pt^TiO2
nanocomposite electrode at 1.0 V vs. Ag^AgCl was observed at the wavelength
region of visible light. Pt^TiO2 nanocomposite electrodes have remarkably
different photoelectrochemical behaviors compared with that of pure TiO2
electrodes.
Hiroshi MATSUBARA, Mikinori KOBAYASHI,
Hiroshi NISHIYAMA,
Nobuo SAITO, Yasunobu INOUE, Masao
MAYUZUMI@a
Analysis and Instrumentation Center, Nagaoka University of Technology
(1603]1 Kamitomioka, Nagaoka 940]2188, Japan)
aTokyo Diamond Tools MFG. Co., Ltd. (2]3]5 Nakane, Meguro, Tokyo
152]0031, Japan)
Received December 15, 2003 ; Accepted March 17, 2004
Co]deposition characteristics of refined nanodiamond particles (5 nm) into
electrolessly plated nickel films were studied. Effects of concentration, temperature
and pH of the baths were investigated. It is suggested that nanodiamond particles
are co]deposited into the film after adsorption on a surface of the plated film.
The authors found that the content of diamond particles in the film increased
with decreasing deposition rate and decreasing hydrogen evolution rate accompanied
by plating reaction. The content did not exceed 2 when we use an ordinary
plating solution; ammoniacal]citrate nickel plating bath.
Yasuko TAKEUCHI,a Kazutaka HIRAKAWA,b
Kimihiro SUSUMU,c
and Hiroshi SEGAWA@a,b
aDepartment of Applied Chemistry, Graduate School of Engineering,
The University of Tokyo (3]8]1 Komaba, Meguro]ku, Tokyo 153]8902, Japan)
bDepartment of Chemistry, Graduate School of Arts and Sciences, The
University of Tokyo (3]8]1 Komaba, Meguro]ku, Tokyo 153]8902, Japan)
cDepartment of Chemistry, University of Pennsylvania (231 South,
34th Street, Philadelphia, PA 19104]6323, U.S.A.)
Received December 30, 2003 ; Accepted March 8, 2004
The redox properties of a series of gcenter]to]edge" phosphorus(V) porphyrin
arrays composed of similar porphyrin units were investigated by cyclic voltammetry.
From the assignments of the reduction peaks, it was revealed that small difference
of electron]donating ability of the axial ligands and the electrostatic intramolecular
interaction affect their redox potentials. Moreover, the comparison of the reduction
potentials enables to determine the polarization direction of the charge transfer
excited]state of the porphyrin arrays.
Shigehito DEKI, Akiyoshi NAKATA, and Minoru MIZUHATA
Department of Chemical Science and Engineering, Faculty of Engineering, Kobe University (1]1 Rokkodai]cho, Nada, Kobe 657]8501, Japan)
Received January 9, 2004 ; Accepted March 8, 2004
For the development of the preparation method of size]controlled nanoparticles,
we applied the liquid phase deposition (LPD) method to the reverse micelle (RM)
reaction contained TritonX]100 and 1]hexanol. We prepared two kinds of metal
oxide nanoparticle; TiO2 and SnO2. The average sizes of
nanoparticles were 5.9 nm and 3.0 nm for TiO2 and SnO2,
respectively. The size distribution was narrow, and crystallization of the particles
was promoted by the nano]scale reaction field. The bandgap was calculated from
UV]Vis spectra. The bandgap energy of SnO2 nanoparticles showed a
larger value at 4.6 eV, whereas that of TiO2 nanoparticles showed
a constant value at 3.2 eV. The quantum effect causes the variation of the bandgap,
however, the effect depends on the kinds of the metal oxide.
El]Maghraby MOHAMED,a Yuuko NAKAMURA,b
Yasuhiro FUJII,c
Michiyo KAMIYA,d and Seichi RENGAKUJI@e
aVenture Business Laboratory, Graduate School of Materials
Science and Technology, Faculty of Engineering, Toyama University (3190 Gofuku,
Toyama 930]8555, Japan)
bCenter for Instrumental Analysis, Toyama University (3190 Gofuku,
Toyama 930]8555, Japan)
cELNA CO., LTD. (30 Ta Torahime]machi, Higashiazai]gun, Siga 529]0142,
Japan)
dVenture Business Laboratory, Toyama University (3190 Gofuku, Toyama
930]8555, Japan)
eDepartment of System Engineering of Materials & Life Science, Faculty
of Engineering, Toyama University (3190 Gofuku, Toyama 930]8555, Japan)
Received October 29, 2003 ; Accepted March 17, 2004
TiO2 thin film, which has high photocatalytic property, was fabricated
from its precursor solution by spin]coating method. The solution was prepared
by the recently developed advanced sol]gel method. This liquid process
is based on the hydrolysis and polymerization of Ti alkoxide in mixed solvent
of butanol and toluene. The obtained solution was transparent without precipitate
and stable, and thus the metal oxide precursor solution was prepared. TG]DTA
analysis of the powder dried in vacuum and XRD patterns of the annealed films
showed that the crystalline anatase phase appeared at 300. This temperature
is lower than that obtained from the conventional sol]gel method. From AFM imaging,
the surface of TiO2 thin film coated on quartz or glass substrates
appeared flat. The photocatalytic activity of TiO2 thin film prepared
by advanced sol]gel method was higher than that prepared by conventional sol]gel
method.
Junji INUKAI,a,b Masatoshi SUGIMASA,b Shueh]Lin YAU,c,d and Kingo ITAYA@b,c
aNICHe, Tohoku University (Aoba]yama 10, Sendai 980]8579, Japan)
bDepartment of Applied Chemistry, Faculty of Engineering, Tohoku
University (Aoba]yama 0.4, Sendai 980]8579, Japan)
cCREST, JST (4]1]8 Kawaguchi, Saitama 332]0012, Japan)
dDepartment of Chemistry, National Central University (ChungLi, 320,
Taiwan)
Received November 25, 2003 ; Accepted March 4, 2004
Adlayer structures of S on Cu(100) and Cu(110) were investigated by using
in situ scanning tunneling microscopy (STM) in alkaline solution. On
Cu(100), the adsorbed S formed a (2103) structure, whereas
a c(2~8) structure was found on Cu(110). Both structures were stable in the
double]layer potential region. At anodic potentials, Cu2S was formed
on both surfaces. On Cu(100), patches of islands with Cu2S(100) surfaces
were observed. On Cu(110), the surface was highly roughened as a result of the
formation of Cu2S.
Takuya SHIMADA,a Isao KOMATSU,a
Takayuki HOMMA,a Hiromi NAKAI,b
and Tetsuya OSAKA@a
aDepartment of Applied Chemistry, School of Science and Engineering,
Waseda University (Okubo, Shinjuku]ku, Tokyo 169]8555, Japan)
bDepartment of Chemistry, School of Science and Engineering, Waseda
University (Okubo, Shinjuku]ku, Tokyo 169]8555, Japan)
Received November 29, 2003 ; Accepted March 5, 2004
The oxidation mechanism of TiCl3 as a reductant for an electroless
deposition process was studied by ab initio molecular orbital method. The reaction
process of TiCl3 proceeds with the substitution of Cl-
to OH-. Net charge and spin density of the reactant, product, and
intermediates were evaluated. It was suggested that the electron emission of
TiCl3, which is originated by the oxidation of Ti(III) to Ti(IV),
took place when Cl is replaced by OH- to form Ti(OH)4.
The catalytic activity of the metal surface, which is one of the most important
factors for the electroless deposition process, was studied using a Pd4
cluster as a model surface. It was suggested that the Pd4 cluster
enhanced the reaction of TiCl3 to emit the electron. The effect of
solvation is also taken into account in terms of the dielectric field constant.
It was indicated that the heat of oxidation reaction shifted to an exothermic
reaction with decreasing dielectric constant, indicating that the reaction preferentially
proceeds in the vicinity of solid^liquid interface. However, it was indicated
that the reaction could proceed in the bulk solution, suggesting that appropriate
stabilization such as formation of complex is required for the application of
the TiCl3 to the electroless deposition process.
Kazuhiro SHIGYO, Sonoko UMEMURA, and Kazumasa KAWASE
Mitsubishi Electric Corporation, Advanced Technology R&D Center (Tsukaguchi Honmachi 8]1]1, Amagasaki, Hyogo 661]8661, Japan)
Received November 25, 2003 ; Accepted March 22, 2004
The chemical etching behaviors of undoped GaAs (100) in tartaric acid (C4H6O6) and hydrogen peroxide (H2O2) aqueous solutions is investigated for the fabrication of nano]structures applied for opt]electronic and photonic devices. The role of the constituents of the etching solution (H2O2 and C4H6O6) is reported clearly. The etching rate of GaAs increases with increased concentration of H2O2, and the cross]sectional etching profile changes from a non]isotropic to an isotropic shape as the H2O2 concentration decreases. X]ray photoelectron spectroscopy studies clarify that the H2O2 oxidizes the GaAs surface, and C4H6O6 removes the oxide layers. Photoelectron peaks attributed to arsenic oxides are obtained from the surface of a GaAs specimen chemically etched in a C4H6O6{H2O2 aqueous solution. It seems that successive oxidation and dissolution of GaAs are performed during chemical etching in C4H6O6{H2O2, and gallium oxide may preferably dissolve into the solution.